,申请号JP19970315452-传众专利搜索

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法人/股东/高管

发明名称
摘要
申请公布号	JP3233205(B2)	申请公布日期	2001.11.26
申请号	JP19970315452	申请日期	1997.11.17
申请人		发明人
分类号	G01N21/88;G01N21/93;G01N21/956;H01L21/66;(IPC1-7):H01L21/66	主分类号	G01N21/88
代理机构		代理人
主权项
地址

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