GAP ZIG USED IN EQUIPMENT FOR MANUFACTURING SEMICONDUCTOR,申请号KR20000025790-传众专利搜索

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发明名称	GAP ZIG USED IN EQUIPMENT FOR MANUFACTURING SEMICONDUCTOR
摘要
申请公布号	KR20010104560(A)	申请公布日期	2001.11.26
申请号	KR20000025790	申请日期	2000.05.15
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	SHIN, GYEONG CHEOL
分类号	(IPC1-7):H01L21/68	主分类号	(IPC1-7):H01L21/68
代理机构		代理人
主权项
地址

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