| 发明名称 |
Metal wire fuse structure with cavity |
| 摘要 |
An integrated circuit has primary devices and redundant devices being selective substituted for the primary devices through at least one fuse. The fuse includes a first layer having at least one fuse link region, a second layer over the first layer and cavities in the second layer above the fuse link region. <IMAGE> |
| 申请公布号 |
EP1032040(A3) |
申请公布日期 |
2001.11.21 |
| 申请号 |
EP20000103742 |
申请日期 |
2000.02.23 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION;INFINEON TECHNOLOGIES AG |
发明人 |
BRINTZINGER, AXEL;KIEWRA, EDWARD W.;NARAYAN, CHANDRASEKHAR;RADENS, CARL J. |
| 分类号 |
H01L21/82;G11C29/04;H01H85/00;H01L21/8242;H01L23/525;H01L27/02;H01L27/108 |
主分类号 |
H01L21/82 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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