| 摘要 |
PROBLEM TO BE SOLVED: To provide a circulating freeze chucking device having simple structure, excellent maintainability of a frozen condition, little deformation by the working force during the working, highly accurate flatness of a reference working surface, and easy maintenance. SOLUTION: The freeze chucking device comprises a top plate 1 having a chucking surface on an upper surface and a refrigerant circulating passage inside, a pedestal 2 and a heat insulation part 3 interposed between the top plate and the pedestal 2. The heat insulation part 3 comprises a plurality of block bodies 3a of the size and the number capable of withstanding the force applied from a tool side, and the block bodies 3a are arranged with suitable intervals so as to have a predetermined space therebetween.
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