| 摘要 |
PROBLEM TO BE SOLVED: To realize a method of measuring a laser axis in a stage moving quantity measuring system using a laser length measuring machine for accurately measuring the relative positions of the laser beam axis of the laser length measuring machine and an electron beam position irradiated on a plotted material on a stage. SOLUTION: In the stage moving quantity measuring system using the laser length measuring machine, mirrors 34x, 34y are provided with antireflection plates 40-43, and the stage 22 is moved in the other direction so that laser beams for measuring a moving quantity in one direction are irradiated on the mirrors across the antireflection plates. The laser beams irradiated on the mirrors across the antireflection plates and reflected are received, and the relative positions of the stage and the laser axis of the laser length measuring system are measured on the basis of the received light quantity change.
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