发明名称 |
Portable high resolution scanning electron microscope column using permanent magnet electron lenses |
摘要 |
A detachable, portable SEM column that is easily disconnected from the electron gun assembly and specimen chamber of the system, allowing different column designs to be used in a given SEM system. As an alternate design, the electron gun and column are configured as a single detachable, portable assembly. The column of the present invention contains a condenser lens and an objective lens, both designed employing permanent magnet elements for primary field generation. Relatively small coils are used for scanning and precise adjustment of focus.
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申请公布号 |
US6320194(B1) |
申请公布日期 |
2001.11.20 |
申请号 |
US20000563117 |
申请日期 |
2000.05.02 |
申请人 |
INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING |
发明人 |
KHURSHEED ANJAM;PHANG JACOB CHEE HONG;THONG JOHN THIAM LEONG |
分类号 |
H01J37/14;H01J37/28;(IPC1-7):H01J37/18 |
主分类号 |
H01J37/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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