| 摘要 |
In a multiple-stage rotary type vacuum pump, gas is compressed in one pump section and passes through a communication path into the next pump section for successive compression. The mechanical seals 51, 52 are arranged in the sides of the housing of the bearings 351, 352. An oil pump 42 for lubrication oil for the bearings is arranged for supplying lubrication oil to the bearings. The oil pump is communicated with the oil vessel 40. The discharge opening of the oil pump is communicated with oil supply pipes 311, 312 communicated with the supporting bodies 341, 342 of the mechanical seals. A return oil piping 43 is arranged for returning the lubrication oil.
|
