| 摘要 |
A contact structure for achieving an electrical connection with a contact target is formed by producing contactors on a semiconductor substrate by a microfabrication technology. The contact structure is formed of a contact substrate and a plurality of contactors mounted on the contact substrate. Each of the contactors has a sphere contact to contact with the contact target when the contact structure is pressed against the contact target. A spring force is generated when the contactor is pressed against the contact target. Various types of contact structures and the production method thereof are also described. |
