| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a heating element suitable for ink jet printer having a high resistivity which can be ensured stably for a long time, a low temperature variation rate of resistance, and a good capitation resistance and can be produced with a good reproducibility, and its producing method. SOLUTION: The heating resistor is formed of a nonmetallic substance consisting of four elements Ta, Si, O and N. The heating resistor having a mole ratio of Si and Ta in the range of 0.35<Si/Ta<0.80, where O is 25-45 mol% and N is 5-25 mol%, has a resistivity of 4 mΩcm or above, an X-ray diffraction analysis peal angle of 37.5 deg. or less and a temperature variation rate of resistance not higher than 0.05%/ deg.C and clears an application test of 100 million pulses. The resistor is annealed following to film formation in order to sustain a desired high resistivity stably for a long time and when a Ta-Si-O- N-H based five element heating resistor is produced by introducing H as a compositional element, a heating resistor having a high resistively can be produced with high reproducibility.</p> |
