| 摘要 |
PROBLEM TO BE SOLVED: To obtain a diffraction optical element of a high diffraction efficiency wherein a round part and a fine surface roughness which are left as unprocessed, do not exist substantially, and a blaze shape wherein a flatness of a slant face part is good, is provided. SOLUTION: In a method for manufacturing a diffraction optical element having a required shape, a process for manufacturing a master mold 1 of a deeper shape than a shape corresponding to a required shape; a process for forming a processing layer 3 on a substrate 2 which is substantially transparent in a wavelength band by using a material which is more easy to processed than the substrate 2 is; a process for forming the processing layer 3 by using the manufactured master mold 1; a process for processing by removing a projected part end face R3 of the formed processing layer 3 to shape corresponding to the required shape; and a process for forming a surface shape of the processing layer 3 to the substrate 2 approximatively in a depth direction by etching the processing layer 3 and the substrate 2, are provided.
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