发明名称 Memory cell for EEPROM devices and corresponding fabricating process
摘要 A memory cell of the EEPROM type formed on a semiconductor material substrate having a first conductivity type includes a drain region having a second conductivity type and extending at one side of a gate oxide region which includes a thin tunnel oxide region. The memory cell also includes a region of electric continuity having the second conductivity type, being formed laterally and beneath the thin tunnel oxide region, and partly overlapping the drain region. The region of electric continuity is produced by implantation at a predetermined angle of inclination.
申请公布号 US6320219(B1) 申请公布日期 2001.11.20
申请号 US20000576168 申请日期 2000.05.22
申请人 SGS-THOMSON MICROELECTRONICS, S.R.L. 发明人 VAJANA BRUNO;CREMONESI CARLO;BOTTINI ROBERTA;DALLA LIBERA GIOVANNA
分类号 H01L21/8247;(IPC1-7):H01L21/824;H01L29/788 主分类号 H01L21/8247
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