Process for producing nitrogen trifluoride and use thereof
摘要
F<SUB>2 </SUB>gas is reacted with NH<SUB>3 </SUB>gas in a gaseous phase at 80° C. or less in the presence of a diluting gas to produce NF<SUB>3</SUB>. Thus, NF<SUB>3 </SUB>is produced with good safety, efficiency and profitability.
