| 摘要 |
PROBLEM TO BE SOLVED: To provide an aluminum nitride sintered compact with suppressed hydrolysis which occurs when the aluminum nitride sintered compact is brought into contact with water. SOLUTION: A coating layer 23 is formed at least on one part of the surface of the aluminum nitride sintered compact 17, and the part where the coating layer 23 is formed of the aluminum nitride sintered compact 17b is subjected to contact treatment with flowing water 1. The contact treatment is carried out by using a treating device having a flow passage 5 for allowing water 1 to flow. The treating device has a treating section 13 to which the aluminum nitride sintered compact 17 is attached for the treatment, a pH-controlling means 9 and a heating means 11. By this treatment, even when a defect part is present in the coated layer 23, the defect part is buried with aluminum hydroxide formed by hydrolysis, thereby making the contact of the aluminum nitride sintered compact 17 with water 1 hardly possible by the coated layer 23 and the aluminum hydroxide burying the defect part of the coated layer 23. Therefore it becomes possible to suppress hydrolysis.
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