发明名称 |
Light-transmitting optical member, manufacturing method thereof, evaluation method therefor, and optical lithography apparatus using the optical member |
摘要 |
An optical member for transmitting light of a wavelength less than about 200 nm including crystalline calcium fluoride with a potassium content less than about 0.5 ppm, wherein a degradation in a transmissivity of the optical member after an irradiation for a fixed period of time with the light of the wavelength of less than about 200 nm is less than about 5% of a transmissivity of the optical member before the irradiation.
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申请公布号 |
US6320700(B2) |
申请公布日期 |
2001.11.20 |
申请号 |
US20010791892 |
申请日期 |
2001.02.26 |
申请人 |
NIKON CORPORATION |
发明人 |
SHIOZAWA MASAKI |
分类号 |
H01L21/027;C01F11/22;C30B29/12;G01M11/00;G01N21/33;G01N21/59;G02B1/02;G03F7/20;(IPC1-7):G02B11/00;G02B3/00;G02B27/02 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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