FILM DEPOSITION SYSTEM, AND DEPOSITION SHIELD MEMBER USED FOR FILM DEPOSITION SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a film deposition system having deposition shield members capable of preventing the deposition of film onto the surface of substrate carriers and enabling easy maintenance at low cost. SOLUTION: The film deposition system 1 has substrate carriers 10 for holding and transferring substrates, and film deposition is carried out by depositing vapor deposition particles onto the substrates mounted on the substrate carriers 10. Detachable deposition shield members 11a to 11c for preventing the deposition of film onto the surface of the substrate carriers 10 are attached to respective bottom faces of the substrate carriers 10.