| 发明名称 |
LIGHT TRANSMITTANCE MEASURING METHOD OF SYNTHETIC QUARTZ GLASS AND OPTICAL DEVICE |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for accurately measuring light transmittance of synthetic quartz glass at the wavelength of 165 nm of below. SOLUTION: In this measuring method of the light transmittance of the synthetic quartz glass at the wavelength of 165 nm or below, measurement is executed with the temperature dispersion in a synthetic quartz glass sample controlled within±1%.
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| 申请公布号 |
JP2001318049(A) |
申请公布日期 |
2001.11.16 |
| 申请号 |
JP20010055220 |
申请日期 |
2001.02.28 |
| 申请人 |
ASAHI GLASS CO LTD;TOYOTA GAKUEN |
发明人 |
IKUSHIMA AKIRA;SAITO KAZUYA;SHIMODAIRA KENSHO;IKUTA YORISUKE;KIKUKAWA SHINYA;YOSHIZAWA SHUHEI |
| 分类号 |
G01N21/33;C03C3/06;G01N21/01;G02B1/00;G03F7/20;H01L21/027;(IPC1-7):G01N21/33 |
主分类号 |
G01N21/33 |
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