| 摘要 |
PROBLEM TO BE SOLVED: To provide a direct imaging electron microscope with small aberrations. SOLUTION: This is equipped with an electron gun 21, a condenser lens 22, a beam separator 23, a magnetic-field type objective lens 24, a specimen stage 25 that mounts a specimen 26 thereon, an intermediate lens 27, an energy analyzer 28, a projection lens 29 and a image detector 30; and constructed so that an electrostatic field is superposed with the lens magnetic field of the objective lens 24. The objective lens 24 consists of an upper yoke 31 connected with an upper magnetic pole 32 at the tip, a lower yoke 33 connected with a lower magnetic pole 34 at the tip, a cylindrical body 30 made of an insulating material, a coil 36 and a disk plate 38. The specimen 26 is kept connected to the ground potential and a positive voltage of +9 kV is kept applied to an upper yoke 35 of the objective lens 24.
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