| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro-valve and a micro-pump allowing washing and partial exchange easily when a foreign matter is mixed and partial malfunction occurs. SOLUTION: A substrate for cover 2 having a substrate for actuator 1 which is driven actually, a valve part 11, and a pumping part 12 is detachable to enable washing easily by removing the substrate for cover 2 when foreign matter is mixed. Furthermore, if malfunction occurs in the valve part 11 and the pumping part 12, the substrate for cover 2 only can be exchanged easily. Moreover, when design such as internal volume and a shutting-off force of a valve is changed, only the substrate for cover 2 is exchanged, and the substrate for actuator 1 can be used in common.
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