发明名称 TREATER
摘要 PROBLEM TO BE SOLVED: To positively push back the bodies to be treated projecting from transport containers into the transport containers to resolve the projection of the bodies to be treated. SOLUTION: A treater constituted in such a structure that a plurality of transport containers 7, which are respectively housed with a plurality of bodies W to be treated in an alignment with each other in the horizontal state, are respectively transferred to storage racks 16 and 17 to store the containers 7 in the racks 16 and 17, the containers 7 are transferred from these racks 16 and 17 to a transfer stand 18, and the bodies W are taken out from the containers 7 on this transfer stand 18 and are subjected to prescribed treatment is provided with a push-on part 29 which is pushed on the front ends, which are projecting from the containers 7 in the depth part of the rack 17, of the bodies W and is used for pushing the front ends back within the containers 7.
申请公布号 JP2001319958(A) 申请公布日期 2001.11.16
申请号 JP20000133712 申请日期 2000.05.02
申请人 TOKYO ELECTRON LTD 发明人 AKIMOTO MOTOI;IWAI HIROYUKI;TAKIGAWA KIJU
分类号 B65G1/00;B65G1/14;H01L21/677;H01L21/68;(IPC1-7):H01L21/68 主分类号 B65G1/00
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