| 摘要 |
PROBLEM TO BE SOLVED: To obtain a three-dimensional photonic crystal material, having a photonic band common for both of the TM mode and the TE mode for the light propagating through an optical waveguide, and to facilitate the method for manufacturing the material. SOLUTION: The three-dimensional photonic crystal material consists of two kinds of dielectric materials having different dielectric constants, and at least one dielectric material is an organic polymer compound. To produce the three-dimensional photonic crystal material, an organic polymer compound film 2, 3 is formed on a substrate 1 and a metal film 4 is laminated on the organic polymer compound film. Then an organic resists is applied on the metal film and formed into a desired pattern by a photolithographic process, and the organic resist is used as a mask to form the metal film into a desired pattern. Then the metal film is used as a mask for forming into the organic polymer compound film into a desired pattern. These steps are repeated. |
