| 摘要 |
PROBLEM TO BE SOLVED: To facilitate manufacturing steps efficient and to reduce manufacturing cost, because the application of the materials of a polymeric waveguide is carried out in only two steps, using the same polymer and to easily provide a multifunctional-multilayered optical waveguide as well as to accurately and easily manufacture single-mode and multi-mode waveguides. SOLUTION: A silanol type organosiloxane polymer is applied on a substrate, patterned and exposed to vapor of an alkylated germanium amine or vapors of an alkylated silicon amine and an alkylated germanium amine to form a core part. |
