| 摘要 |
PROBLEM TO BE SOLVED: To realize a focus detecting device and an autofocusing microscope by which the position of a sample surface is highly accurately and easily detected even though the sample has unevenness on its surface and which are easily assembled. SOLUTION: The detecting device and the microscope possess one-dimensional light sources 31, 32 and 33 whose point light sources are arrayed in one direction, focus detecting optical systems 15 and 16 to project the image of the one-dimensional light source on the sample surface and to project the image of the one-dimensional light source projected on the sample surface to an image formation surface and an aperture 35 arrayed in accordance with each point light source of the one-dimensional light source projected on the image formation surface, and are provided with a one-dimensional aperture 34 arranged so as to be tilted to the image formation surface, a one-dimensional photodetector 36 to detect light passing through each aperture of the one-dimensional aperture and a signal processor 37 to detect the position of the sample surface in the optical axis direction of the focus detecting optical system by processing the output of the one-dimensional photodetector. |
