| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid processing device capable of processing the edge of a substrate without causing an adverse effect to a device forming region and finely controlling the width of the edge of the substrate to process. SOLUTION: Chemicals are sprayed on the edge of a substrate from above its one side and then made to spread over the edge of the other side. The edge of the substrate is processed with the spreading chemicals, and the width of the processed edge of the substrate is controlled by a chemical spread control member provided on the other side of the substrate.
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