| 摘要 |
PROBLEM TO BE SOLVED: To easily carry out attaching and detaching work for a cover in an atmospheric pressure side by simple structure, and to make dust, an insect and the like easily removed even when they come into an inside of the cover. SOLUTION: The disklike cover 27 is composed of a cover body 27A having a size substantially same to a sideface 8 in the atmospheric pressure side of a detector body 24, and for covering a seal diaphragm 9, and four supporting parts 27B foldedly formed in an outer circumference of the cover body 27A with equal spacing. The cover body 27A is separated from the detector body 24 to form a proper gap G, by fixing the supporting parts 27B onto the body 24.
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