| 摘要 |
PROBLEM TO BE SOLVED: To provide a film-thickness measuring apparatus which is used for management for securing quality by causing the apparatus to display the thickness of each layer of a multilayered film on-line. SOLUTION: This film-thickness measuring apparatus which measures the film-thickness of each layer of a multilayered film, is provided with a radiation thickness gauge, an infrared thickness gauge, and an arithmetic means which computes the thickness of each layer based on the indicated value of each thickness gauge and the absorption sensitivity characteristic of each layer constituting the multilayered film found in advance.
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