| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow rate measuring apparatus requiring few manufacturing man-hours, at a low cost. SOLUTION: The support member 11 for the flow rate measuring apparatus 10 is molded integrally with a resin. A recess 12 is formed on the member 11, and a sensor 20 is contained in the recess 12. Both ends 11a, 11b of the member 11 in an intake air flow direction are each formed in a convexly curved surface state. A frame element 21 is formed of a single-crystal silicon and fixed to the recess 1 with an adhesive 35. A cavity 21a is formed in the element 21, and a temperature-detecting resistor is disposed in a thin-film diaphragm 22 which covers the cavity 21a. The faces of the member 11 and the element 21 of the side where the detecting resistor is formed, are disposed substantially in the same plane. As the detection resistor, an intake air temperature detector 30, a flow rate detector 31, a heating resistor 32 and a flow rate detector 33 are disposed, starting from the upstream side of the arrow of the intake air in the forward direction.
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