| 摘要 |
PROBLEM TO BE SOLVED: To enable sure displacement operation in a two-dimentional plane and improve resonance frequency and displacement operation. SOLUTION: In this piezoelectric/electrostrictive device 10A, a pair of thin plate parts 16a and 16b which face each other, a movable part 20, and a fixing part 22 for retaining the thin plate parts 16a and 16b and the movable part 20 are installed. Piezoelectric/electrostrictive elements 24a and 24b are arranged on at least one out of the thin plates 16a and 16b, and a hole 12 is formed of both inner walls of the thin plates 16a and 16b, an inner wall 20a of the movable part 20 and an inner wall 22a of the fixing part 22. At least one beam 40 is arranged from the inner wall 20a of the movable part 20 as far as the inner wall 22a of the fixing part 22. |
