| 摘要 |
PROBLEM TO BE SOLVED: To prevent a vibration turbulence in the driving direction of a vibrator caused by unnecessary rotational vibration. SOLUTION: A driving monitor means (a comb-like tooth-shaped fixing electrode part 6 and a movable electrode part 15 in a region that is surrounded by a dot line M) is provided in the center-of-cavity region of a vibration body 8, where the driving monitor means detects vibration displacement in the X direction (driving direction) of the vibration body 8. When the unnecessary rotational vibration caused by acceleration application occurs in the vibration body 8, the center of the rotational vibration is set to the center-of-gravity region of the vibration body 8, thus reducing the vibrational displacement in the driving direction of the center-of-gravity of the vibration body 8 caused by the unnecessary rotational vibration. The output signal of the driving monitor means is used for the positive feedback control of the vibration body 8. In this case, although the vibration in the driving direction of the vibration body 8 is disturbed when noise caused by the unnecessary rotational vibration that is included in the output signal is large, the vibration in the driving direction of the vibration body 8 can be continued stably, even if the unnecessary rotational vibration is produced. |
