| 摘要 |
<p>PROBLEM TO BE SOLVED: To propose a detection system, particularly for particle beam apparatus, that has made the detection system available even when differences between primary, secondary and back-scattered particles are very small and that can preferentially detect secondary particles emitted from an object or particles backwardly scattered by the object. SOLUTION: Provided on a target structure 5 are paraxial median regions (6, 23, 29) that are received in regions (7, 24, 28) far from the axial line made of materials intensively converting electrons, and adjacent to the light axis (25) of the particle beam apparatus.</p> |
