METHOD AND DEVICE FOR SCHEDULE MANAGING OF MULTI- CLUSTER TOOL

摘要

PROBLEM TO BE SOLVED: To provide a method and a device for schedule managing multi-cluster tool by which any algorithm can be selected from a number of scheduling algorithms. SOLUTION: These method and device are used to analyze a schedule for a multi-cluster tool which is adopted for semiconductor wafer processing or used in similar manufacturing application examples. They include a schedule analyzer and a pass-through chamber control program. The device allows a user to analyze N! kinds of possible scheduling routine (algorithm) in the configuration of a desired multi-cluster tool and the process sequence of a desired N step. A rank of priority is assigned to every processing step among schedules which the user or automatization proposes, so that a plurality of possible scheduling algorithms are led out to desired set of input parameters.