发明名称 POLYMER COMPOSITION CONTAINING CLEAN FILLER INCORPORATED THEREIN
摘要 <p>An elastomer composition which contains an extremely clean filler reduced in both water generation and organic outgassing and is suitable for use as a molding material for semiconductor production apparatuses; and a crosslinked molding of the composition. The composition is a crosslinkable composition comprising a polymer, especially a crosslinkable fluoroelastomer, and a filler having a weight loss through 2-hour heating at 200°C of up to 2.5x10-5 wt.% per m2 of the surface area and having a total amount of organic gases generated through 15-minute heating at 200°C of 2.5 ppm or smaller.</p>
申请公布号 WO2001085848(P1) 申请公布日期 2001.11.15
申请号 JP2001003686 申请日期 2001.04.27
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