ANTI-VIBRATION APPARATUS, EXPOSURE APPARATUS USING THE SAME, DEVICE MANUFACTURING METHOD, AND ANTI-VIBRATION METHOD

摘要

An anti-vibration apparatus for actively damping an object vibrations by generating control forces for reducing the vibrations includes a first actuator for generating a first control force, and a second actuator which generates a second control force and is driven on a driving principle different from that for the first actuator. The first actuator generates forces in the vertical and horizontal directions. The second actuator generates a force in at least one of the vertical and horizontal directions.