| 摘要 |
The present invention provides a method which when a semi-finished product requiring cleanliness is transported between a processing and treating apparatus and a sealed vessel, maintains cleanliness of atmosphere without cleaning outside. When the transported sealed vessel is connected to an air lock means provided on the processing and treating apparatus, space of the air lock means is blocked from the outside such as cleanroom. After that, the air lock space is removed of contaminated external atmosphere. Then, transfer of the semi-finished product is performed between the vessel and the processing and treating apparatus. During this time, the sealed vessel and the processing and treating apparatus is maintained in the cleanliness. This invention localizes and saves the clean plenum needed for clean fabrication, which realizes the reduction of environmental cleanliness in a clean factory. Also, compared with the minienvironment method, this invention saves the footprints of fabrication apparatuses.
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