发明名称 Semiconductor wafer and method for manufacturing semiconductor devices
摘要 A method for dividing a semiconductor wafer which is covered by an opaque resin in a dicing process includes forming marks on the semiconductor wafer, wherein the marks are distinguished from electrodes which are formed on the semiconductor wafer. According to the method, in a dicing process, separating semiconductor chips from the semiconductor wafer can be precisely achieved.
申请公布号 US2001041425(A1) 申请公布日期 2001.11.15
申请号 US20010916320 申请日期 2001.07.30
申请人 OHSUMI TAKASHI;KATO YUZO 发明人 OHSUMI TAKASHI;KATO YUZO
分类号 H01L21/301;H01L21/60;H01L23/544;(IPC1-7):H01L21/44;H01L21/48;H01L21/50;H01L21/46;H01L21/78 主分类号 H01L21/301
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