发明名称 Parts maintenance managing system
摘要 A system comprises a first maintenance interval storage for storing a first maintenance interval of each component which is not related to an actual utilization of an apparatus, a second maintenance interval storage storing a second maintenance interval of each component which is related to the actual utilization of the apparatus, a maintenance demander for demanding maintenance of some component based on the passing of the first maintenance interval of this component; and a maintenance interval prolonger for judging the second maintenance interval has passed or not based on the passing of the first maintenance interval, and when the second maintenance interval has not yet passed, suspending the demand for maintenance by the maintenance demander and prolonging the first maintenance interval. Consequently, it becomes possible to manage a maintenance timing of each component and give notice thereof on the side of the apparatus composed of a plurality of components.
申请公布号 US2001041076(A1) 申请公布日期 2001.11.15
申请号 US20010853748 申请日期 2001.05.14
申请人 TOKYO ELECTRON LIMITED 发明人 OGATA KUNIE;AIUCHI TAKASHI;TATEYAMA MASANORI
分类号 G06Q50/10;G03F7/20;G06Q50/00;H01L21/02;H01L21/027;(IPC1-7):G03D3/00 主分类号 G06Q50/10
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