发明名称 Semiconductor device with transparent link area for silicide applications and fabrication thereof
摘要 Useful to inhibit reverse engineering, semiconductor devices and methods therefor include formation of two active regions over a substrate region in the semiconductor device. According to an example embodiment, a dopable link, or region, between two heavily doped regions can be doped to achieve a first polarity type, with the two heavily doped regions of the opposite polarity. If dictated by design requirements, the dopable region is adapted to conductively link the two heavily doped regions. A dielectric is formed over the dopable region and extends over a portion of each of the two heavily doped regions to inhibit silicide formation over edges of the dopable region. In connection with a salicide process, a silicide is then formed adjacent the dielectric and formed over another portion of the two heavily doped regions.
申请公布号 US2001041431(A1) 申请公布日期 2001.11.15
申请号 US20010912194 申请日期 2001.07.24
申请人 VLSI TECHNOLOGY, INC. 发明人 SCOTT GREGORY STUART;DE MUIZON EMMANUEL;MANLEY MARTIN HAROLD
分类号 H01L21/28;H01L21/285;H01L21/3205;H01L21/60;H01L21/822;H01L21/8234;H01L23/52;H01L27/04;H01L27/08;H01L27/088;(IPC1-7):H01L21/337;H01L21/336;H01L21/823;H01L21/425;H01L21/44;H01L21/302;H01L21/461 主分类号 H01L21/28
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