发明名称 APPARATUS AND METHOD FOR TEMPERATURE SENSING OF AN ELEMENT OF A ROTATING PLATTER
摘要 The present invention relates to a method and an apparatus for sensing the temperature of an element of a rotating platter (20). The apparatus includes a collimated optical pyrometer positioned such that light emitted from an element (32) of the rotating platter is preiodically visible to the optical pyrometer (40). A pluralitery of optical windows (24) are formed in the rotating platter and a reference body (42) is positioned opposite the rotating platter from the optical pyrometer such that light emitted from the reference body is periodically visible to the optical pyrometer through the optical windows. The reference body and the elements of the rotating platter are chosen to have substantially the same emissivities. The reference body is maintained at the temperature the elements of the rotating platter are desired to be controlled to, such that a controller (50) connected to the optical pyrometer and to heaters (30) operationally coupled to the platter elements can determine the temperature of the elements relative to the reference body and send control signals to the respective heaters to maintain the elements at the same temperature as the reference body.
申请公布号 WO0185350(A1) 申请公布日期 2001.11.15
申请号 WO2001US13221 申请日期 2001.04.25
申请人 UMM ELECTRONICS, INC.;STOUGHTON, JOHN, M. 发明人 STOUGHTON, JOHN, M.
分类号 G01J5/00;G01J5/10;(IPC1-7):B04B9/14;G01N21/17 主分类号 G01J5/00
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