| 发明名称 |
Method of producing electrodes of a micromechanical or microelectronic device |
| 摘要 |
A method for producing electrodes in a micromechanical or microelectronic device, includes the steps of producing a shape-imparting supporting structure in or on a substrate; enlarging the surface of the shape-imparting supporting structure; and molding the electrodes, using the enlarged-surface, shape-imparting supporting structure.
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| 申请公布号 |
US2001041406(A1) |
申请公布日期 |
2001.11.15 |
| 申请号 |
US20000732152 |
申请日期 |
2000.12.07 |
| 申请人 |
GOEBEL BERND;GUTSCHE MARTIN |
发明人 |
GOEBEL BERND;GUTSCHE MARTIN |
| 分类号 |
B81C1/00;H01L21/02;H01L21/768;H01L21/8242;(IPC1-7):H01L21/824;H01L21/20 |
主分类号 |
B81C1/00 |
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