SEMICONDUCTOR MANUFACTURING SYSTEM AND CONTROL METHOD THEREOF

摘要

In a semiconductor manufacturing system, operations of a plurality of processing apparatuses are controlled to efficiently manufacture semiconductor devices. The semiconductor manufacturing system has a memory part and a control part. The memory part (5) stores priority-level data indicating a priority level of the process to be applied to each of the semiconductor substrates on an individual semiconductor substrate basis. The control part (3, 7) controls the processing apparatus to apply the process to a newly supplied semiconductor substrates by determining process order, based on a comparison of the new priority-level data of the newly supplied one with priority-level data with respect to the originally scheduled process of the semiconductor substrates.