发明名称 |
MICROSCALE MASS SPECTROMETRIC CHEMICAL-GAS SENSOR |
摘要 |
A mass sensor (10) includes a magnet assembly (12) and a mass analyzer (14). The mass analyzer includes a ceramic housing formed from two end plates and a center portion. The mass analyzer further includes a thermionic electron emitter ionizer, a double focusing mass spectrometer having superimposed orthogonal magnetic and electric fields, and a microchannel plate ion detector located in the housing cavity. The double focusing mass spectrometer includes an electric sector energy analyzer having a film resistor deposited on an inside surface of each end plate. The film resistors are substantially concentric and congruent and have a circular arc shape. Boundary electrodes are positioned adjacent each curved edge of each film resistor. The mass sensor includes a non-evaporable getter mounted inside the housing cavity and external electrical contacts are arranged to form a multi-layer printed circuit card that is installable in a circuit card edge connector.
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申请公布号 |
WO0185312(A1) |
申请公布日期 |
2001.11.15 |
申请号 |
WO2001US14549 |
申请日期 |
2001.05.07 |
申请人 |
MASS SENSORS, INC. |
发明人 |
BERGER, PHILIP, S.;GENTRY, W., RONALD |
分类号 |
G01N27/62;G06Q20/00;H01J49/02;H01J49/28;H04L29/08;(IPC1-7):B01D59/44;H01J40/00 |
主分类号 |
G01N27/62 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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