发明名称 |
H02 DOPED W03, ULTRA-FAST, HIGH-SENSITIVE HYDROGEN SENSORS |
摘要 |
An ultra-fast response, high sensitivity structure for optical detection of low concentrations of hydrogen gas, comprising: a substrate; a water-doped W O3 layer coated on the substrate; and a palladium layer coated on the water-dop ed WO3 layer. |
申请公布号 |
CA2408099(A1) |
申请公布日期 |
2001.11.15 |
申请号 |
CA20012408099 |
申请日期 |
2001.05.05 |
申请人 |
MIDWEST RESEARCH INSTITUTE |
发明人 |
PITTS, J. ROLAND;TRACY, C. EDWIN;LIU, PING;LEE, SE-HEE |
分类号 |
G01N21/78;G01N33/00;(IPC1-7):G01N21/78;C23C14/00 |
主分类号 |
G01N21/78 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|