发明名称 |
Method for producing 1,2-naphthoquinone-diazide photosensitive agent |
摘要 |
<p>The present invention provides a method for producing a high-purity 1,2-naphthoquinonediazide photosensitive agent containing a low level of impurities, involving effecting condensation, in an organic solvent other than amide, between a polyhydric phenolic compound and a 1,2-naphthoquinonediazide-sulfonic acid halide in the presence of an organic amine; subsequently adding an amide solvent to the resultant reaction mixture; and filtering off the formed organic amine acid salt through filtration.</p> |
申请公布号 |
EP1153915(A2) |
申请公布日期 |
2001.11.14 |
申请号 |
EP20010110602 |
申请日期 |
2001.04.30 |
申请人 |
TOYO GOSEI KOGYO CO., LTD. |
发明人 |
YAMANAKA, TOMOTAKA;HAYAKAWA, MASAMICHI |
分类号 |
G03F7/022;C07B61/00;C07C303/28;C07C309/72;C07C309/76;H01L21/027;(IPC1-7):C07C303/28 |
主分类号 |
G03F7/022 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|