A process for concentrating fluorine compounds

摘要

The process removes from a diluted gas one or more fluorine compounds present at a first concentration in the diluted gas and concentrates the fluorine compounds. This is done by directly contacting the diluted gas with a cryogenic liquid having a temperature less than or equal to about -150 DEG F, thereby producing a vapor lean in the fluorine compounds and liquid enriched with the fluorine compounds at a second concentration. The second concentration is greater than the first concentration.