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发明名称
SILICON WAFER FOR EPITAXIAL WAFER, EPITAXIAL WAFER, AND METHOD OF MANUFACTURE THEREOF
摘要
申请公布号
KR20010101656(A)
申请公布日期
2001.11.14
申请号
KR1020017009292
申请日期
2001.07.24
申请人
发明人
分类号
H01L21/20
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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