Method and device for optically inspecting objects on a substrate,申请号EP19990964865-传众专利搜索

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发明名称	Method and device for optically inspecting objects on a substrate
摘要
申请公布号	EP1153265(A1)	申请公布日期	2001.11.14
申请号	EP19990964865	申请日期	1999.12.14
申请人	MYDATA AUTOMATION AB	发明人	BOSTROEM, GUNNAR;JOHANNESSON, MATTIAS;SANDGREN, SIMON;AHLEN, HANS
分类号	G01B11/02;G01B11/04;G01N21/89;G01N21/956;G06T1/00;H01L21/52;(IPC1-7):G01B11/04	主分类号	G01B11/02
代理机构		代理人
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