| 摘要 |
<p>A piezoelectric/electrostrictive film type device, useful as a sensor, has a lower electrode (4), an auxiliary electrode (8), a piezoelectric/electrostrictive film (5) and an upper electrode (6) layered on a substrate (1) made of a ceramic material having a thin vibratable diaphragm (3) surrounded by a thick region (2). To avoid variations in vibration characteristics due to a region between the lower and auxiliary electrodes which is incompletely bonded to the diaphragm, the lower electrode (4) is arranged extending continuously from the thin diaphragm to the thick region, the auxiliary electrode is provided on the thick region at a location separated from the lower electrode, and the piezoelectric/electrostrictive film is arranged bridging between the lower electrode and the auxiliary electrode. <IMAGE></p> |
