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发明名称
IMPROVEMENT OF LIQUID DEPOSITION BY SELECTION OF LIQUID VISCOSITY AND OTHER PRECURSOR PROPERTIES
摘要
申请公布号
EP1153427(A1)
申请公布日期
2001.11.14
申请号
EP19990968888
申请日期
1999.12.14
申请人
SYMETRIX CORPORATION;MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人
HAYASHI, SHINICHIRO;MCMILLAN, LARRY, D.;PAZ DE ARAUJO, CARLOS, A.
分类号
C23C18/12;C23C18/14;H01L21/31;H01L21/314;H01L21/316;H01L21/8242;H01L21/8246;H01L27/105;H01L27/108;(IPC1-7):H01L21/316;B05D1/34
主分类号
C23C18/12
代理机构
代理人
主权项
地址
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