发明名称 Gapped-plate capacitor
摘要 In a semicondutor device, a capacitor is provided which has a gap in at least one of its plates. The gap is small enough so that fringe capacitance between the sides of this gap and the opposing plate at least compensates, if not overcompensates, for the missing conductive material that would otherwise fill the gap and add to parallel capacitance. As a result, the capacitance of a storage device can be increased without taking up more die area. Alternatively, the size of a capacitor can be reduced with no decrease in capacitance. Various gap configurations and methods for providing them are also within the scope of the current invention.
申请公布号 US6316326(B1) 申请公布日期 2001.11.13
申请号 US19990229857 申请日期 1999.01.13
申请人 发明人
分类号 H01L21/334;H01L29/94;(IPC1-7):H01L21/20 主分类号 H01L21/334
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