COLD CATHODE ELECTRON EMISSION DEVICE

摘要

PURPOSE: A cold cathode electron emission device is provided to emit instantly electrons without a preheating process by forming an inversion layer using an electric field. CONSTITUTION: A p+ type cathode(52) is formed on a center portion of an upper portion of a p-type substrate(51) in order to emit electrons. An n+ contact region(53) is formed around the p+ type cathode(52). An insulating layer(54) is formed on the p-type substrate(51) and the n+ contact region(53). A gate metal layer(55) is formed on an upper portion of the insulating layer(54). An anode(60) is formed on an upper portion of the gate metal layer(55). An inversion layer as a shallow channel is formed on an upper portion of the p+ type cathode(52) by an electric potential difference between the gate metal layer(55) and the n+ contact region(53) and a total electric potential difference between the gate metal layer(55) and the p-type substrate(51).