| 摘要 |
PROBLEM TO BE SOLVED: To make a reaction vessel compact and simultaneously to improve reaction efficiency by uniformizing the flow velocity distribution of a gas passing in the vessel. SOLUTION: This plasma reaction vessel is provided with the first metallic flat-plate electrode 11A and second metallic flat-plate electrode 11B opposed to each other, a dielectric 12 interposed between the electrodes 11A and 11B and a means for imparting a potential difference between the electrodes 11A and 11B, and a high voltage is impressed between the electrodes 11A and 11B to plasma-decompose the introduced gas 15 in the region 16 between the electrodes 11A and 11B. The electrodes 11A and 11B and dielectric 12 are formed into a doughnut-shaped disk, respectively, and placed on one another, and a gas passage is provided inside and outside the gap between the electrodes 11A and 11B, respectively. |
